Main objective of this course is to introduce students to micro- and nano-scale devices. After successfully completing this short course, students will have an idea about MEMS and NEMS devices and their applications. They will know how to design, analyze and characterize a micro or nano system. They will also have an idea about MEMS fabrication.
INTENDED AUDIENCE : Interested audience
PRE- REQUISITES : Basic Physics, Electronics and Mechanics
SUPPORT INDUSTRY : TSMC, ASML, Sandisk, Applied Materials etc. semiconductor and process technology based companies
Week 1 : What is small! From millimeter to angstrom; MEMS sensors introduction and application
Week 2 : Si and its properties; Microfabrication and lithography
Week 3 : Fundamentals of stress-strain, electrostatics and energy dissipation
Week 4 : Design and analysis of Micro Sensors; Case study: Accelerometer, Pressure sensor