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Online Course

A brief introduction of Micro-Sensors

NPTEL via Swayam

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Overview

Main objective of this course is to introduce students to micro- and nano-scale devices. After successfully completing this short course, students will have an idea about MEMS and NEMS devices and their applications. They will know how to design, analyze and characterize a micro or nano system. They will also have an idea about MEMS fabrication.   INTENDED AUDIENCE : Interested audience PRE- REQUISITES : Basic Physics, Electronics and Mechanics SUPPORT INDUSTRY : TSMC, ASML, Sandisk, Applied Materials etc. semiconductor and process technology based companies

Syllabus

COURSE LAYOUT Week 1 : What is small! From millimeter to angstrom; MEMS sensors introduction and application Week 2 : Si and its properties; Microfabrication and lithography Week 3 : Fundamentals of stress-strain, electrostatics and energy dissipation Week 4 : Design and analysis of Micro Sensors; Case study: Accelerometer, Pressure sensor

Taught by

Prof. Santanu Talukder

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